Development of surface relief on polycrystalline metals due to sputtering
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2013
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2013.03.005